Multi-Sensor Metrology Tools for Hybrid Metrology
June 24, 2019
SEMI spoke with Thomas Fries, founder and CEO of FRT GmbH, about how hybrid metrology is shaping multi-sensor metrology tools to enhance measurement precision as the industry moves away from a single-sensor approach.
How will Graphene, the 2D Wonder Material, Change the Semiconductor Industry?
September 18, 2018
Materials innovation has always been vital to the semiconductor industry. In the past, it was high-κ gate dielectrics. Today, Cobalt is seen as a replacement for Tungsten in middle-of-line (MOL) contacts.