Multi-Sensor Metrology Tools for Hybrid Metrology
June 24, 2019
SEMI spoke with Thomas Fries, founder and CEO of FRT GmbH, about how hybrid metrology is shaping multi-sensor metrology tools to enhance measurement precision as the industry moves away from a single-sensor approach.
Smart Manufacturing and Digital Twins for the Semiconductor Industry
December 18, 2018
Semiconductor fabs have been getting smarter and smarter over the past 30 years. It’s a natural evolution – the direct outcome of numerous continuous-improvement efforts. The really important difference on the road to smarter fabs, the one change...